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µPistons™ Technology

For decades, MEMS actuators have been known to possess a weak structure in their comb-drive electrode configuration, resulting in limited force and out-of-plane stroke.

However, about 10 years ago, the founders of Sheba Microsystems, then at the University of Toronto, introduced an innovative solution by inventing the piston-tube electrode configuration. This breakthrough overcame the limitations of the traditional comb-drive structure and paved the way for significant advancements in piston-tube technology, leading to the state-of-the-art version we see today.

The piston-tube electrodes take advantage of a larger capacitive area, allowing for substantial stroke and increased force. This advancement has enabled Sheba’s MEMS actuators to achieve autofocus and Optical Image Stabilization in embedded vision and compact cameras.

Additionally, the µPistons™ design makes the MEMS actuators resilient against severe shocks and impacts encountered during drop tests, as the electrodes are well-supported and interconnected with each other.

Unique Approach:
Moving Bond-Wires

Unique Approach: Moving Bond-Wires

Sheba’s patented approach moves the lightweight sensor to achieve autofocus – instead of moving the lens.

Wire-bonding on a floating, moving structure has been a challenge; however, Sheba has developed over the years the know-how of the direct wire-bonding from the sensor the outer PCB.

The moving bond wires are stiff, thus they don’t sway, touch each other, or break during severe drops, shocks, or vibrations.

Robust and automated wire-bonding process
that has been developed over the years

Robust and automated wire-bonding process that has been developed over the years

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Advantages

Small Size Actuator

Thin actuator fits perfectly
under the sensor.

Lower Power Consumption

The MEMS actuator acts as a capacitor; it consumes low power.

Fast speed

Settling time is < 2ms

Sub-micron Accuracy

Generates ultra fine motions
as small as 100’s nm.

No Electromagnetic Interference

No negative effect on the device’s antenna.

No Hysteresis

Highly repeatable motion
with sub-micron precision.

Flexibility with Lens Type and Design

Enable large aperture lenses.

Less Dynamic / Moving Tilt

The tilt angle is <.03 degrees.

Compatible with Large Sensors

No limitation on the size of
the sensor format.

Small Size Actuator

Thin actuator fits perfectly
under the sensor.

Lower Power Consumption

The MEMS actuator acts as a capacitor; it consumes low power.

Fast speed

Settling time is < 2ms

Sub-micron Accuracy

Generates ultra fine motions
as small as 100’s nm.

No Electromagnetic Interference

No negative effect on the device’s antenna.

No Hysteresis

Highly repeatable motion
with sub-micron precision.

Flexibility with Lens Type and Design

Enable large aperture lenses.

Less Dynamic / Moving Tilt

The tilt angle is <.03 degrees.

Compatible with Large Sensors

No limitation on the size of
the sensor format.

Drop Test

Thermally stable, highly rugged
and handles shocks.

Thermally stable -40 to 150° C

Best-in-Class Solutions for Embedded Vision and Compact Cameras

Highly Reliable Technology

Sheba autofocus actuator technology has passed all major reliability tests including the following:
Test Spec Status
High Temp. storage test
85℃ / 120 hours
Pass
Low Temp. storage test
-40℃ / 120 hours
Pass
High Temp. High Hum.
85°C / 85%RH / 200 Hours
Pass
Life cycle
100M cycles
Drive the MEMS at full stroke using a triangle wave at 100 Hz for 12 days
Pass
Thermal cycling
1 cycle profile:
Temperature start at 25°C; Cool down to -40°C at 3°C/minute ramp rate; Soak for 20 minutes; Heat up to 85°C at 3°C/minute ramp rate; Soak for 20 minutes;
Cool down to 25°C at 3°C/minute ramp rate.
Repeat 600 cycles
Pass
High Temp. Operational
75℃ / 120 hours
Pass
Low Temp. Operational
-20℃ / 120 hours
Pass
Tumble test
1m chamber. Total: 100 drops. Speed: 8 RPM
Pass
Microdrop test
Test Jig: 90g, Drop Height: 10CM
Each 6 faces drop 300 times, total 1800 times.
Pass
Drop test
Height: 1m to concrete floor, 6 faces/2 times, total 12 times
Conditions: free fall using vacuum machine. MEMS is assembled into a camera module.
Jig weight is 90g
Pass

Want to test out Sheba’s technology in your own lab?

Want to test out Sheba’s technology
in your own lab?

Want to test out Sheba’s technology in your own lab?

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